IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '91 proceedings, October 21-23, 1991, Boston, Massachusetts : soft. : case. : micro.

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '91 proceedings, October 21-23, 1991, Boston, Massachusetts : soft.

Material type: 図書

Author: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshopほか

Publisher: Institute of Electrical and Electronics Engineers

Publication date: c1991

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Notes on use

Note (General)：: "sponsored by: Semiconductor Equipment and Materials International, Institute of Electrical and Electronics Engineers, Inc.(IEEE), IEEE Electron Devic...

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Paper

Material Type: 図書
ISBN: 0780301528
0780301536
0780301544
Title: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '91 proceedings, October 21-23, 1991, Boston, Massachusetts
Volume: : soft.
: case.
: micro.
Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
https://ci.nii.ac.jp/author/DA05419489
Institute of Electrical and Electronics Engineers
https://ci.nii.ac.jp/author/DA00739948
Semiconductor Equipment and Materials International
https://ci.nii.ac.jp/author/DA0468648X
Publication, Distribution, etc.: Institute of Electrical and Electronics Engineers
Additional copies may be purchased from IEEE Service Center
Publication Date: c1991
Publication Date (W3CDTF): 1991
Size: 28 cm
Alternative Title: 91CH30429
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Electronic industries -- Congresses
Semiconductors -- Design and construction -- Congresses
Computer integrated manufacturing systems -- Congresses
LCC: TK7836
Target Audience: 一般
Note (General): "sponsored by: Semiconductor Equipment and Materials International, Institute of Electrical and Electronics Engineers, Inc.(IEEE), IEEE Electron Devices Society, IEEE Components, Hybrids and Manufacturing Technology Society"--cover
Includes bibliographical references
"IEEE catalog number 91CH3042-9"--T.p. verso
Related Material (URI): https://ci.nii.ac.jp/ncid/BA13832699#entity
https://lccn.loc.gov/91072812
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA13832699 : BA13832699
LC Control Number: 91072812
https://lccn.loc.gov/91072812