Water vapor in DC reactive magnetron sputtering plasma : characteristics and applications

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Material Type: 図書
Title: Water vapor in DC reactive magnetron sputtering plasma : characteristics and applications
Author/Editor: Catapang Allen Vincent Barabona
Author Heading: Catapang, Allen Vincent Barabona
Publication, Distribution, etc.: [Catapang Allen Vincent Barabona]
Publication Date: [2023]
Publication Date (W3CDTF): 2023
Size: 31 cm
Alternative Title: 反応性マグネトロンスパッタリングプラズマ中の水蒸気 : 特徴と応用
Text Language Code: en
Target Audience: 一般
Note (General): 同志社大学博士論文(甲)第1311号
Includes bibliographical references
Related Material (URI): https://ci.nii.ac.jp/ncid/BD0849352X#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BD0849352X : BD0849352X