64- to 256-megabit reticle generation : technology requirements and approaches : proceedings of a conference held 24 September 1993, Santa Clara, California hardcover

Material type: 図書

Author: Gregory K. Hearn, editor ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology

Publisher: SPIE Optical Engineering Press

Publication date: c1994

Material Format: Paper

Capacity, size, etc.: 27 cm

NDC: -

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Note (General)：: Includes bibliographical references and index

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Critical reviews of optical science and technology

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Paper

Material Type: 図書
ISBN: 0819413577
Title: 64- to 256-megabit reticle generation : technology requirements and approaches : proceedings of a conference held 24 September 1993, Santa Clara, California
Volume: hardcover
Author/Editor: Gregory K. Hearn, editor ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
Author Heading: Conference on the 64- tomegabit Reticle Generation
Hearn, Gregory K.
BACUS (Technical group)
https://ci.nii.ac.jp/author/DA08910530
Society of Photo-optical Instrumentation Engineers
https://ci.nii.ac.jp/author/DA00848546
Publication, Distribution, etc.: SPIE Optical Engineering Press
Publication Date: c1994
Publication Date (W3CDTF): 1994
Size: 27 cm
Alternative Title: Sixty-four to two hundred fifty-six-megabit reticle generation
Technology requirements and approaches
Proceedings of the Conference on the 64- to 256-megabit Reticle Generation, 24 September 1993, Santa Clara, California
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Integrated circuits -- Masks -- Congresses
Reticles -- Congresses
Microlithography -- Congresses
Semiconductor storage devices -- Design and construction -- Congresses
LCC: TK7874
Target Audience: 一般
Note (General): Includes bibliographical references and index
Related Material: Critical reviews of optical science and technology
https://cir.nii.ac.jp/crid/1130282270437036160
Related Material (URI): https://ci.nii.ac.jp/ncid/BD09147637#entity
https://lccn.loc.gov/93046150
Periodical Title: Critical reviews of optical science and technology
https://cir.nii.ac.jp/crid/1130282270437036160
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BD09147637 : BD09147637
LC Control Number: 93046150
https://lccn.loc.gov/93046150