レーザラマン分光法による半導体イオン打込層の構造回復及び活性化機構の微視的解明

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Material Type: 図書
Title: レーザラマン分光法による半導体イオン打込層の構造回復及び活性化機構の微視的解明
Title Transcription: レーザラマンブンコウホウニヨルハンドウタイイオンウチコミソウノコウゾウカイフクオヨビカッセイカキコウノビシテキカイメイ
Author/Editor: 研究代表者河東田隆
Author Heading: 河東田, 隆カトウダ, タカシ
https://ci.nii.ac.jp/author/DA00880833
Publication, Distribution, etc.: [河東田隆]
Publication Date: 1986.3
Publication Date (W3CDTF): 1986
Size: 27cm
Place of Publication (Country Code): ja
Text Language Code: ja
Target Audience: 一般
Note (General): 昭和60年度文部省科学研究費補助金(一般研究B)研究成果報告書.研究課題番号(59460051)
Related Material (URI): https://ci.nii.ac.jp/ncid/BN06271888#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BN06271888 : BN06271888