Studies on diagnostics of activated species in reactive plasmas and their applications to nano and micro fabrications

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Note (General)：: Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2007Kind of academic degree: 博士(工学)Date degree granted: 2007-03-23...

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Material Type: 図書
Title: Studies on diagnostics of activated species in reactive plasmas and their applications to nano and micro fabrications
Author/Editor: Keigo Takeda
Author Heading: 竹田, 圭吾タケダ, ケイゴ
Publication, Distribution, etc.: [s.n.]
Publication Date: [2007]
Publication Date (W3CDTF): 2007
Size: 30 cm
Alternative Title: 反応性プラズマ中の活性種の診断およびナノ・マイクロ加工への応用に関する研究
Text Language Code: en
Target Audience: 一般
Note (General): Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2007
Kind of academic degree: 博士(工学)
Date degree granted: 2007-03-23
Report number: 甲第7525号
Diploma number: 工博第2114号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB13284739#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB13284739 : BB13284739