図書

Proceedings of the Symposium on Laser Processes for Microelectronic Applications

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Proceedings of the Symposium on Laser Processes for Microelectronic Applications

Material type
図書
Author
edited by J.J. Ritsko, D.J. Ehrlich, M. Kashiwagi
Publisher
Electrochemical Society
Publication date
c1988
Material Format
Paper
Capacity, size, etc.
23 cm
NDC
-
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Notes on use

Note (General):

Includes bibliographical references and index"... held in Honolulu, Hawaii, October 21-22, 1987" -- on pref"Dielectrics and Insulation and Electronics...

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Paper

Material Type
図書
Author/Editor
edited by J.J. Ritsko, D.J. Ehrlich, M. Kashiwagi
Publication, Distribution, etc.
Publication Date
c1988
Publication Date (W3CDTF)
1988
Size
23 cm
Alternative Title
Laser processes for microelectronic applications
Place of Publication (Country Code)
us