SEMIテクノロジーシンポジウム '88講演予稿集 : 0.5μm時代への挑戦

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Material Type: 図書
Title: SEMIテクノロジーシンポジウム '88講演予稿集 : 0.5μm時代への挑戦
Title Transcription: SEMI テクノロジーシンポシウム '88 コウエンヨコウシュウ : 0.5μm ジダイエノチョウセン
Author Heading: Semiconductor Equipment and Materials Institute
https://ci.nii.ac.jp/author/DA0291497X
Publication, Distribution, etc.: SEMI
Publication Date: [1988?]
Publication Date (W3CDTF): 1988
Size: 28cm
Alternative Title: SEMI-Technology Symposium '88 proceedings : breakthrough technology toward half-micron geometry
Technical proceedings SEMICON/Japan 1988
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): "November 28-30, Toranomon Pastoral, Tokyo, Japan"
Related Material (URI): https://ci.nii.ac.jp/ncid/BN02996470#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BN02996470 : BN02996470