図書

1999 4th International Symposium on Plasma Process-Induced Damage, May 9-11, 1999, Monterey, California, USA :softbound

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1999 4th International Symposium on Plasma Process-Induced Damage, May 9-11, 1999, Monterey, California, USA :softbound

Material type
図書
Author
editors, Thuy Dao, Mitsumasa Koyanagi, Terence Hook ; technical co-sponsors,IEEE/Electron Devices Society, American Vacuum Society, Japan Society of Applied Physics
Publisher
the American Vacuum Society
Publication date
c1999
Material Format
Paper
Capacity, size, etc.
28 cm
NDC
-
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Notes on use

Note (General):

"P2ID"--Cover"Plasma process-induced damage"--Cover"IEEE Catalog Number 99TH8395"...

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Paper

Material Type
図書
ISBN
0965157733
Volume
:softbound
Author/Editor
editors, Thuy Dao, Mitsumasa Koyanagi, Terence Hook ; technical co-sponsors,IEEE/Electron Devices Society, American Vacuum Society, Japan Society of Applied Physics
Publication, Distribution, etc.
Publication Date
c1999
Publication Date (W3CDTF)
1999
Size
28 cm