Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982 : us : gw

Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982 : us

Material type: 図書

Author: editors, H. Ryssel and H. Glawischnig

Publisher: Springer-Verlag

Publication date: 1982

Material Format: Paper

Capacity, size, etc.: 24 cm

NDC: -

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Note (General)：: Includes bibliographies and index

Related materials as well as pre- and post-revision versions

Springer series in electrophysics

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Paper

Material Type: 図書
ISBN: 0387118780
3540118780
Title: Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982
Volume: : us
: gw
Author/Editor: editors, H. Ryssel and H. Glawischnig
Author Heading: Ion Implantation School
https://ci.nii.ac.jp/author/DA03453486
Ryssel, Heiner
https://ci.nii.ac.jp/author/DA03451695
Glawischnig, H. (Hans)
https://ci.nii.ac.jp/author/DA03451764
International Conference on Ion Implantation: Equipment and Techniques
https://ci.nii.ac.jp/author/DA03451844
Publication, Distribution, etc.: Springer-Verlag
Publication Date: 1982
Publication Date (W3CDTF): 1982
Size: 24 cm
Place of Publication (Country Code): gw
Text Language Code: en
Subject Heading: Ion implantation -- Addresses, essays, lectures
Semiconductor doping -- Addresses, essays, lectures
LCC: TK7871.85
Target Audience: 一般
Note (General): Includes bibliographies and index
Related Material: Springer series in electrophysics
https://cir.nii.ac.jp/crid/1130000796156683776
Related Material (URI): https://ci.nii.ac.jp/ncid/BA07160406#entity
https://lccn.loc.gov/82016883
Periodical Title: Springer series in electrophysics
https://cir.nii.ac.jp/crid/1130000796156683776
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA07160406 : BA07160406
LC Control Number: 82016883
https://lccn.loc.gov/82016883