シリコンウェーハの洗浄と分析 = Surface cleaning and analysis for silicon wafer

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Material Type: 図書
ISBN: 4898080057
Title: シリコンウェーハの洗浄と分析 = Surface cleaning and analysis for silicon wafer
Title Transcription: シリコンウェーハノセンジョウトブンセキ = Surface cleaning and analysis for silicon wafer
Author/Editor: 島ノ江憲剛 [ほか]著
Author Heading: 島ノ江, 憲剛シマノエ, ノリタケ
Publication, Distribution, etc.: リアライズ社
Publication Date: 1998.4
Publication Date (W3CDTF): 1998
Size: 30cm
Place of Publication (Country Code): ja
Text Language Code: ja
Subject Heading: シリコン(半導体)
NDC 8th ed.: 549.8
NDLC: ND371
Target Audience: 一般
Note (General): 監修: 島ノ江憲剛
その他の執筆者: 上村賢一, 森良弘, 大塚進
各章末: 参考文献
Related Material (URI): https://ci.nii.ac.jp/ncid/BA36477610#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA36477610 : BA36477610