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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 9784908520037
- Title Transcription
- ハンドウタイ カコウ ソウチ ノ カイハツシ = Development of semiconductor fabrication equipment : ハンドウタイ ノ ビサイカ ト セイゾウ ノ システムカ エノ チョウセン
- Author/Editor
- 通研半導体技術史 (装置編) 編集委員会編著
- Author Heading
- 向井, 久和 ムカイ, ヒサカズ通研半導体技術史 (装置編) 編集委員会 ツウケン ハンドウタイ ギジュツシ ソウチヘン ヘンシュウ イインカイ
- Publication, Distribution, etc.
- Publication Date
- 2016.3
- Publication Date (W3CDTF)
- 2016
- Size
- 30cm