Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council

Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council

Material type: 図書

Author: National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems

Publisher: National Academy Press

Publication date: 1992

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

View All

Notes on use

Note (General)：: "NMAB-461."Includes bibliographical references

Search by Bookstore

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

List of Cooperating Institutions and Databases

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 図書
ISBN: 0309046351
Title: Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council
Author Heading: National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems
https://ci.nii.ac.jp/author/DA07086605
Publication, Distribution, etc.: National Academy Press
Publication Date: 1992
Publication Date (W3CDTF): 1992
Size: 28 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Microelectronics industry
Molecular beams -- Industrial applications
Microelectronics -- Materials
Plasma-enhanced chemical vapor deposition -- Industrial applications
LCC: TK7836
Target Audience: 一般
Note (General): "NMAB-461."
Includes bibliographical references
Related Material (URI): https://ci.nii.ac.jp/ncid/BA19434804#entity
https://lccn.loc.gov/92060205
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA19434804 : BA19434804
LC Control Number: 92060205
https://lccn.loc.gov/92060205