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CiNii Research
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Bibliographic Record
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- Material Type
- 図書
- Author/Editor
- with the scientific support of GRESSI (Grenoble Submicron Silicon), INPG (Institut National Polytechnique Grenoble) ; with the financial help of CEA-LETI (Laboratorie d'Electronique, de Technologie et d'Instrumentation ... [et al.] ; sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'Education nationale, de l'Enseignement supérieue et de la Recherche, IEEE-EDS
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 1997
- Publication Date (W3CDTF)
- 1997
- Size
- 24 cm
- Alternative Title
- MAM '97
- Place of Publication (Country Code)
- fr