Advanced metallization for ULSI applications (formerly workshop on tungsten and other advanced metals for ULSI applications) : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan

Advanced metallization for ULSI applications (formerly workshop on tungsten and other advanced metals for ULSI applications) : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan

Material type: 図書

Author: sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. ; editors: Virendra V.S. Rana, Rajiv V. Joshi, Iwao Ohdomari ; associate editors, Robert S. Blewer ... [et al.]

Publisher: Materials Research Society

Publication date: c1992

Material Format: Paper

Capacity, size, etc.: 24 cm

NDC: -

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Note (General)：: Contains papers presented at the Advanced Metallization for ULSI Applications ConferenceIncludes bibliography and index

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Materials Research Society conference proceedings

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Paper

Material Type: 図書
ISBN: 1558991522
Title: Advanced metallization for ULSI applications (formerly workshop on tungsten and other advanced metals for ULSI applications) : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan
Author/Editor: sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. ; editors: Virendra V.S. Rana, Rajiv V. Joshi, Iwao Ohdomari ; associate editors, Robert S. Blewer ... [et al.]
Author Heading: Rana, Virendra Vir Singh
https://ci.nii.ac.jp/author/DA06902338
Joshi, Rajiv V.
https://ci.nii.ac.jp/author/DA06902429
大泊, 巌オオドマリ, イワオ
https://ci.nii.ac.jp/author/DA04850889
University of California, Berkeley. Continuing Education in Engineering
https://ci.nii.ac.jp/author/DA03481732
Advanced Metallization for ULSI Applications Conference
https://ci.nii.ac.jp/author/DA06902509
Publication, Distribution, etc.: Materials Research Society
Publication Date: c1992
Publication Date (W3CDTF): 1992
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Contains papers presented at the Advanced Metallization for ULSI Applications Conference
Includes bibliography and index
Related Material: Materials Research Society conference proceedings
https://cir.nii.ac.jp/crid/1130000796625384192
Related Material (URI): https://ci.nii.ac.jp/ncid/BA14203167#entity
https://lccn.loc.gov/92213162
Periodical Title: Materials Research Society conference proceedings
https://cir.nii.ac.jp/crid/1130000796625384192
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA14203167 : BA14203167
LC Control Number: 92213162
https://lccn.loc.gov/92213162