Semiconductor fabrication : technology and metrology

Material type: 図書

Author: Dinesh C. Gupta, editor

Publisher: ASTM

Publication date: c1989

Material Format: Paper

Capacity, size, etc.: 24 cm

NDC: -

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Note (General)：: Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsore...

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ASTM special technical publication

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Paper

Material Type: 図書
ISBN: 0803112734
Title: Semiconductor fabrication : technology and metrology
Author/Editor: Dinesh C. Gupta, editor
Author Heading: Gupta, D. C. (Dinesh C.)
Symposium on Semiconductor Processing (5th : 1988 : Santa Clara, Calif.)
ASTM Committee F-1 on Electronics
Semiconductor Equipment and Materials International
Publication, Distribution, etc.: ASTM
Publication Date: c1989
Publication Date (W3CDTF): 1989
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Semiconductors -- Design and construction -- Congresses
LCC: TK7871.85
Target Audience: 一般
Note (General): Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials International
Includes bibliographies and indexes
"ASTM publication code number (PCN) 04-990000-46"--T.p. verso
Related Material: ASTM special technical publication
https://cir.nii.ac.jp/crid/1130000794449700736
Related Material (URI): https://ci.nii.ac.jp/ncid/BA07637305#entity
https://lccn.loc.gov/89033789
Periodical Title: ASTM special technical publication
https://cir.nii.ac.jp/crid/1130000794449700736
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA07637305 : BA07637305
LC Control Number: 89033789
https://lccn.loc.gov/89033789