過剰空孔の導入及びその緩和過程制御による疑似単結晶シリコン形成技術の研究

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Material Type: 図書
Title: 過剰空孔の導入及びその緩和過程制御による疑似単結晶シリコン形成技術の研究
Title Transcription: カジョウクウコウノドウニュウオヨビソノカンワカテイセイギョニヨルギジタンケッショウシリコンケイセイギジュツノケンキュウ
Author/Editor: 研究代表者宮尾正信
Author Heading: 宮尾, 正信ミヤオ, マサノブ
https://ci.nii.ac.jp/author/DA14179386
Publication, Distribution, etc.: [九州大学]
Publication Date: 2003.3
Publication Date (W3CDTF): 2003
Size: 30cm
Alternative Title: 平成12年度-平成14年度科学研究費補助金(基盤研究(B)(2))研究成果報告書(12450015)
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 研究分担者:佐道泰造ほか
Related Material: 科学研究費補助金(基盤研究(B)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000796573175552
Related Material (URI): https://ci.nii.ac.jp/ncid/BA63919278#entity
Periodical Title: 科学研究費補助金(基盤研究(B)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000796573175552
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA63919278 : BA63919278