2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings, April 30-May 2, 2002, Boston, Massachusetts, USA : soft

2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings, April 30-May 2, 2002, Boston, Massachusetts, USA : soft

Material type: 図書

Author: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshopほか

Publisher: IEEE Service Center

Publication date: c2002

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Notes on use

Note (General)：: Includes bibliographical references"IEEE catalog number 02CH37259"--on cover

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Paper

Material Type: 図書
ISBN: 0780371585
Title: 2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2002 proceedings, April 30-May 2, 2002, Boston, Massachusetts, USA
Volume: : soft
Author Heading: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
https://ci.nii.ac.jp/author/DA05419489
Institute of Electrical and Electronics Engineers
https://ci.nii.ac.jp/author/DA00739948
Semiconductor Equipment and Materials International
https://ci.nii.ac.jp/author/DA0468648X
Publication, Distribution, etc.: IEEE Service Center
Publication Date: c2002
Publication Date (W3CDTF): 2002
Size: 28 cm
Alternative Title: 02CH37259
The 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference : advancing the science and technology of semiconductor manufacturing : ASMC 2002, April 30-May 2, Seaport Hotel, Boston, MA USA
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Includes bibliographical references
"IEEE catalog number 02CH37259"--on cover
Related Material (URI): https://ci.nii.ac.jp/ncid/BA56874216#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA56874216 : BA56874216