Handbook of silicon based MEMS : materials and technologies : hbk

Notes on use

Note (General)：: Other editors: Markku Tilli, Ari Lehto, Teruaki MotookaIncludes bibliographical references and index

Related materials as well as pre- and post-revision versions

Search by Bookstore

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Paper
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
ISBN: 9780815515944
Title: Handbook of silicon based MEMS : materials and technologies
Volume: : hbk
Author/Editor: by Veikko Lindroos ... [et al.]
Author Heading: Lindroos, Veikko
Tilli, Markku
Lehto, Ari
本岡, 輝昭モトオカ, テルアキ
https://ci.nii.ac.jp/author/DA1955321X
Publication, Distribution, etc.: William Andrew
Publication Date: 2010
Publication Date (W3CDTF): 2010
Size: 29 cm
Alternative Title: Handbook of silicon based MEMS : materials & technologies
Handbook of silicon based MEMS materials and technologies
Place of Publication (Country Code): ne
Text Language Code: en
Subject Heading: Microelectromechanical systems
Microelectromechanical systems -- Materials
Silicon -- Electric properties
Target Audience: 一般
Note (General): Other editors: Markku Tilli, Ari Lehto, Teruaki Motooka
Includes bibliographical references and index
Related Material: Micro & nano technologies
https://cir.nii.ac.jp/crid/1130282269383601280
Related Material (URI): https://ci.nii.ac.jp/ncid/BB01469329#entity
Periodical Title: Micro & nano technologies
https://cir.nii.ac.jp/crid/1130282269383601280
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB01469329 : BB01469329