Microtechnology and MEMS

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Laser diode microsystems CMOS hotplate chemical microsensors Surface tension in microsystems : engineering below the capillary length Fast simulation of electro-thermal MEMS : efficient dynamic compact models Micromechanical photonics Shape memory microactuators Design and manufacturing of active microsystems Force sensors for microelectronic packaging applications CCD image sensors in deep-ultraviolet : degradation behavior and damage mechanisms Modelling of microfabrication systems Mechanical microsensors Capillary forces in microassembly : modeling, simulation, experiments, and case study Thermal transport for applications in micro/nanomachining CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications Capillary forces in microassembly : modeling, simulation, experiments, and case study Micromachines as tools for nanotechnology Silicon microchannel heat sinks : theories and phenomena Electromechanical systems in microtechnology and mechatronics : electrical, mechanical and acoustic networks, their interactions and applications Integrated chemical microsensor systems in CMOS technology Advanced analytical methods in tribology Piezo-electric electro-acoustic transducers

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Paper

Material Type: 図書
Title: Microtechnology and MEMS
Publication, Distribution, etc.: Springer
Place of Publication (Country Code): gw
Target Audience: 一般
Related Material: Laser diode microsystems
https://cir.nii.ac.jp/crid/1130000794137337600
CMOS hotplate chemical microsensors
https://cir.nii.ac.jp/crid/1130000794544497408
Surface tension in microsystems : engineering below the capillary length
https://cir.nii.ac.jp/crid/1130000794665842560
Fast simulation of electro-thermal MEMS : efficient dynamic compact models
https://cir.nii.ac.jp/crid/1130000796335474048
Micromechanical photonics
https://cir.nii.ac.jp/crid/1130000797598035328
Shape memory microactuators
https://cir.nii.ac.jp/crid/1130282268701684224
Design and manufacturing of active microsystems
https://cir.nii.ac.jp/crid/1130282268793905152
Force sensors for microelectronic packaging applications
https://cir.nii.ac.jp/crid/1130282268803546496
CCD image sensors in deep-ultraviolet : degradation behavior and damage mechanisms
https://cir.nii.ac.jp/crid/1130282269017096320
Modelling of microfabrication systems
https://cir.nii.ac.jp/crid/1130282269363506688
Mechanical microsensors
https://cir.nii.ac.jp/crid/1130282269621806848
Capillary forces in microassembly : modeling, simulation, experiments, and case study
https://cir.nii.ac.jp/crid/1130282269682776832
Thermal transport for applications in micro/nanomachining
https://cir.nii.ac.jp/crid/1130282270255441408
CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications
https://cir.nii.ac.jp/crid/1130282270775959296
Capillary forces in microassembly : modeling, simulation, experiments, and case study
https://cir.nii.ac.jp/crid/1130282271040296576
Micromachines as tools for nanotechnology
https://cir.nii.ac.jp/crid/1130282271073761024
Silicon microchannel heat sinks : theories and phenomena
https://cir.nii.ac.jp/crid/1130282271694434944
Electromechanical systems in microtechnology and mechatronics : electrical, mechanical and acoustic networks, their interactions and applications
https://cir.nii.ac.jp/crid/1130282271787429120
Integrated chemical microsensor systems in CMOS technology
https://cir.nii.ac.jp/crid/1130282271977690624
Advanced analytical methods in tribology
https://cir.nii.ac.jp/crid/1130282272101970304
Piezo-electric electro-acoustic transducers
https://cir.nii.ac.jp/crid/1130851617799803662
Related Material (URI): https://ci.nii.ac.jp/ncid/BA51409718#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA51409718 : BA51409718