フォトルミネッセンスによるシリコン結晶中の軽元素・重金属不純物の評価

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Material Type: 図書
Title: フォトルミネッセンスによるシリコン結晶中の軽元素・重金属不純物の評価
Title Transcription: フォトルミネッセンスニヨルシリコンケッショウチュウノケイゲンソジュウキンゾクフジュンブツノヒョウカ
Author/Editor: 研究代表者田島道夫 ; 研究分担者藁品正敏
Author Heading: 田島, 道夫タジマ, ミチオ
https://ci.nii.ac.jp/author/DA0884048X
藁品, 正敏ワラシナ, マサトシ
Publication, Distribution, etc.: [田島道夫]
Publication Date: 1995.9
Publication Date (W3CDTF): 1995
Size: 30 cm
Place of Publication (Country Code): ja
Text Language Code: ja
Target Audience: 一般
Note (General): 平成6年度科学研究費補助金 (一般研究(B)) 研究成果報告書
研究課題番号05452099
Related Material (URI): https://ci.nii.ac.jp/ncid/BA53824878#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA53824878 : BA53824878