図書

合金組成比を任意に制御できる低温・高速スパッタ装置の開発研究

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合金組成比を任意に制御できる低温・高速スパッタ装置の開発研究

Material type
図書
Author
畑朋延[研究代表]
Publisher
金沢大学工学部
Publication date
1989.3
Material Format
Paper
Capacity, size, etc.
26cm
NDC
-
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Notes on use

Note (General):

昭和63年度科学研究費補助金(試験研究(2))研究成果報告書[研究課題番号]:61850050

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Paper

Material Type
図書
Title Transcription
ゴウキン ソセイヒ オ ニンイ ニ セイギョ デキル テイオン コウソク スパッタ ソウチ ノ カイハツ ケンキュウ
Author/Editor
畑朋延[研究代表]
Publication, Distribution, etc.
Publication Date
1989.3
Publication Date (W3CDTF)
1989
Size
26cm
Place of Publication (Country Code)
ja