Extreme ultraviolet lithography : from the topical meeting, May 1-3, 1996, Boston, Massachusetts : pbk

Material type: 図書

Author: edited by Glenn D. Kubiak and Don R. Kania ; sponsored by Optical Society of America

Publisher: Optical Society of America

Publication date: c1996

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Note (General)：: Includes bibliographical references (p. 222-232) and indexes

Related materials as well as pre- and post-revision versions

OSA trends in optics and photonics

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Paper

Material Type: 図書
ISBN: 1557524351
Title: Extreme ultraviolet lithography : from the topical meeting, May 1-3, 1996, Boston, Massachusetts
Volume: : pbk
Author/Editor: edited by Glenn D. Kubiak and Don R. Kania ; sponsored by Optical Society of America
Author Heading: Kubiak, Glenn D.
Kania, Don R.
https://ci.nii.ac.jp/author/DA08880269
Optical Society of America
https://ci.nii.ac.jp/author/DA00534515
Publication, Distribution, etc.: Optical Society of America
Publication Date: c1996
Publication Date (W3CDTF): 1996
Size: 28 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Optical coatings -- Congresses
Photolithography -- Congresses
Ultraviolet radiation -- Industrial applications -- Congresses
Interferometry -- Congresses
Lasers -- Industrial applications -- Congresses
LCC: TS517.2
Target Audience: 一般
Note (General): Includes bibliographical references (p. 222-232) and indexes
Related Material: OSA trends in optics and photonics
https://cir.nii.ac.jp/crid/1130000796688445440
Related Material (URI): https://ci.nii.ac.jp/ncid/BA52291180#entity
https://lccn.loc.gov/95072755
Periodical Title: OSA trends in optics and photonics
https://cir.nii.ac.jp/crid/1130000796688445440
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA52291180 : BA52291180
LC Control Number: 95072755
https://lccn.loc.gov/95072755