Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan

Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan

Material type: 図書

Author: editors, Russell C. Ellwanger, Shi-Qing Wang

Publisher: Materials Research Society

Publication date: c1996

Material Format: Paper

Capacity, size, etc.: 24 cm

NDC: -

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Note (General)：: Includes bibliographical references and indexes

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Materials Research Society conference proceedings

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Paper

Material Type: 図書
ISBN: 155899341X
Title: Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan
Author/Editor: editors, Russell C. Ellwanger, Shi-Qing Wang
Author Heading: Ellwanger, Russell C.
https://ci.nii.ac.jp/author/DA11347305
Wang, Shi-Qing
https://ci.nii.ac.jp/author/DA11347316
University of California, Berkeley. Continuing Education in Engineering
https://ci.nii.ac.jp/author/DA03481732
Publication, Distribution, etc.: Materials Research Society
Publication Date: c1996
Publication Date (W3CDTF): 1996
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
Vapor-plating -- Congresses
Electrochemical metallizing -- Congresses
Dielectrics -- Congresses
Titanium nitride -- Congresses
LCC: TK7874.76
Target Audience: 一般
Note (General): Includes bibliographical references and indexes
Related Material: Materials Research Society conference proceedings
https://cir.nii.ac.jp/crid/1130000796625384192
Related Material (URI): https://ci.nii.ac.jp/ncid/BA35820037#entity
https://lccn.loc.gov/96209712
Periodical Title: Materials Research Society conference proceedings
https://cir.nii.ac.jp/crid/1130000796625384192
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA35820037 : BA35820037
LC Control Number: 96209712
https://lccn.loc.gov/96209712