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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- チョウ コウコウリツ タイヨウ デンチ サクセイ ノ タメノ クラスタ ハンノウ セイギョ プラズマ CVD
- Author/Editor
- 研究代表者 渡辺征夫
- Author Heading
- 渡辺, 征夫 ワタナベ, ユキオ
- Publication, Distribution, etc.
- Publication Date
- 2005.5
- Publication Date (W3CDTF)
- 2005
- Size
- 30cm
- Alternative Title
- 平成14〜16年度科学研究費補助金(基盤研究(A)(2))研究成果報告書