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図書

次世代ULSI用超低抵抗コンタクト材料の開発

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次世代ULSI用超低抵抗コンタクト材料の開発

Material type
図書
Author
安田幸夫著
Publisher
[出版者不明]
Publication date
1999.3
Material Format
Paper
Capacity, size, etc.
30cm
NDC
-
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Notes on use

Note (General):

課題番号: 08505001研究分担者: 財満鎭明, 岩野博隆, 須黒恭一

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Paper

Material Type
図書
Title Transcription
ジセダイ ULSIヨウ チョウテイ テイコウ コンタクト ザイリョウ ノ カイハツ
Author/Editor
安田幸夫著
Publication, Distribution, etc.
Publication Date
1999.3
Publication Date (W3CDTF)
1999
Size
30cm
Alternative Title
平成8年度-平成10年度科学研究費補助金(基盤研究(A)(2))研究成果報告書