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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 9788178953014
- Author/Editor
- editors, Jiwang Yan, John Patten
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 2007
- Publication Date (W3CDTF)
- 2007
- Size
- 22cm
- Alternative Title
- Semiconductor machining at the micro-nano scale