Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II

Material type: 図書

Author: editors, Bernd O. Kolbesen ... [et al.] ; Electronics Division [of the Electrochemical Society]

Publisher: Electrochemical Society

Publication date: c1997

Material Format: Paper

Capacity, size, etc.: 23 cm

NDC: -

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Note (General)：: "This ... volume contains the 13 invited papers, 21 of 22 contributed papers and 10 papers presented as poster at the Second Symposium on 'Crystalline...

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Paper

Material Type: 図書
ISBN: 1566771757
Title: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II
Author/Editor: editors, Bernd O. Kolbesen ... [et al.] ; Electronics Division [of the Electrochemical Society]
Author Heading: Symposium on Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing
https://ci.nii.ac.jp/author/DA12237561
Kolbesen, Bernd O.
https://ci.nii.ac.jp/author/DA07746930
Electrochemical Society. Electronics Division
https://ci.nii.ac.jp/author/DA0357072X
Symposium on Silicon Cleaning Technology
https://ci.nii.ac.jp/author/DA12237572
Electrochemical Society. Meeting
https://ci.nii.ac.jp/author/DA03398898
International Society of Electrochemistry. Meeting
https://ci.nii.ac.jp/author/DA12237583
Publication, Distribution, etc.: Electrochemical Society
Publication Date: c1997
Publication Date (W3CDTF): 1997
Size: 23 cm
Alternative Title: Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Integrated circuits -- Very large scale integration -- Congresses
Crystals -- Defects -- Congresses
Contamination (Technology) -- Congresses
LCC: TK7874.75
Target Audience: 一般
Note (General): "This ... volume contains the 13 invited papers, 21 of 22 contributed papers and 10 papers presented as poster at the Second Symposium on 'Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing' which was part 01B of the Symposium on Silicon Cleaning Technology' held at the '1997 Joint International Meeting--The 192nd Meeting of the Electrochemical Society and the 48th Annual Meeting of the International Society of Electrochemistry' from August 31 to September 5, 1997 in Paris/France."--Preface
Includes bibliographic references and indexes
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Related Material (URI): https://ci.nii.ac.jp/ncid/BA43133972#entity
https://lccn.loc.gov/97197231
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA43133972 : BA43133972
LC Control Number: 97197231
https://lccn.loc.gov/97197231