Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.

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Note (General)：: Includes indexOther editors: Mark G. da Silva, S. Mark Spearing, Srikar Vengallatore

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Material Type: 図書
ISBN: 9781558999909
Title: Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.
Author/Editor: editors, David A. LaVan ... [et al.]
Author Heading: LaVan, David A.
https://ci.nii.ac.jp/author/DA16348327
da Silva, Mark G.
https://ci.nii.ac.jp/author/DA16348338
Spearing, S. Mark
https://ci.nii.ac.jp/author/DA16348349
Vengallatore, Srikar
https://ci.nii.ac.jp/author/DA1634835X
Publication, Distribution, etc.: Materials Research Society
Publication Date: c2008
Publication Date (W3CDTF): 2008
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Includes index
Other editors: Mark G. da Silva, S. Mark Spearing, Srikar Vengallatore
Related Material: Materials Research Society symposium proceedings
https://cir.nii.ac.jp/crid/1130282268858574848
Related Material (URI): https://ci.nii.ac.jp/ncid/BA86491577#entity
Periodical Title: Materials Research Society symposium proceedings
https://cir.nii.ac.jp/crid/1130282268858574848
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA86491577 : BA86491577