図書

Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing

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Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing

Material type
図書
Author
edited by B.O. Kolbesen ... [et al.] ; [sponsored by the] Electronics Division
Publisher
Electrochemical Society
Publication date
c1993
Material Format
Paper
Capacity, size, etc.
23 cm
NDC
-
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Notes on use

Note (General):

Symposium held in Grenoble, France, on September 17th, 1993Includes bibliographical references and indexes

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Paper

Material Type
図書
ISBN
1566770599
Author/Editor
edited by B.O. Kolbesen ... [et al.] ; [sponsored by the] Electronics Division
Publication, Distribution, etc.
Publication Date
c1993
Publication Date (W3CDTF)
1993
Size
23 cm
Place of Publication (Country Code)
us