Studies on development of microwave excited non-equilibrium atmospheric pressure plasma source and its application to material processing

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Note (General)：: Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2005Kind of academic degree: 博士(工学)Date degree granted: 2005-03-25...

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Material Type: 図書
Title: Studies on development of microwave excited non-equilibrium atmospheric pressure plasma source and its application to material processing
Author/Editor: Koji Yamakawa
Author Heading: 山川, 晃司ヤマカワ, コウジ
Publication, Distribution, etc.: [s.n.]
Publication Date: [2005]
Publication Date (W3CDTF): 2005
Size: 30 cm
Alternative Title: マイクロ波励起非平衡大気圧プラズマ源の開発と材料プロセスへの応用に関する研究
Text Language Code: en
Target Audience: 一般
Note (General): Thesis (Ph.D.)--Nagoya University. Graduate School of Engineering, 2005
Kind of academic degree: 博士(工学)
Date degree granted: 2005-03-25
Report number: 甲第6671号
Diploma number: 工博第1932号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB13561941#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB13561941 : BB13561941