図書

高密度プラズマを用いた大面積多結晶シリコン薄膜の低温形成

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高密度プラズマを用いた大面積多結晶シリコン薄膜の低温形成

Material type
図書
Author
豊田浩孝 [ほか著]
Publisher
[出版者不明]
Publication date
2000.3
Material Format
Paper
Capacity, size, etc.
30cm
NDC
-
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Notes on use

Note (General):

課題番号:09558055研究分担者: 菅井秀郎, 中村圭二, 北川雅俊

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Paper

Material Type
図書
Title Transcription
コウミツド プラズマ オ モチイタ ダイメンセキ タケッショウ シリコン ハクマク ノ テイオン ケイセイ
Author/Editor
豊田浩孝 [ほか著]
Publication, Distribution, etc.
Publication Date
2000.3
Publication Date (W3CDTF)
2000
Size
30cm
Alternative Title
平成9〜11年度科学研究費補助金(基盤研究(B)展開研究)研究成果報告書