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High Purity Silicon 11

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High Purity Silicon 11

Material type
図書
Author
editors, E. Simoen ... [et al.]
Publisher
Electrochemical Society
Publication date
c2010
Material Format
Paper
Capacity, size, etc.
23 cm
NDC
-
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Includes bibliographical references and index"The paperes included in this issue of ECS Transactions were originally presented in the symposium "High ...

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Paper

Material Type
図書
ISBN
9781607681809
Author/Editor
editors, E. Simoen ... [et al.]
Publication, Distribution, etc.
Publication Date
c2010
Publication Date (W3CDTF)
2010
Size
23 cm
Alternative Title
High Purity Silicon 11 : dielectric and semiconductor materials, devices, and processing