Vacuum technology, thin films, and sputtering : an introduction

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Material Type: 図書
ISBN: 0126747806
Title: Vacuum technology, thin films, and sputtering : an introduction
Author/Editor: R.V. Stuart
Author Heading: Stuart, R. V.
https://ci.nii.ac.jp/author/DA00183250
Publication, Distribution, etc.: Academic Press
Publication Date: 1983
Publication Date (W3CDTF): 1983
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Vacuum technology
Thin films
Cathode sputtering (Plating process)
LCC: TP156.V3
Target Audience: 一般
Note (General): Includes index
Related Material (URI): https://ci.nii.ac.jp/ncid/BA06945480#entity
https://lccn.loc.gov/82013748
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA06945480 : BA06945480
LC Control Number: 82013748
https://lccn.loc.gov/82013748