界面組成変調層を用いたサブ0.1μm世代ULSI用低抵抗コンタクト構造の研究

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Material Type: 図書
Title: 界面組成変調層を用いたサブ0.1μm世代ULSI用低抵抗コンタクト構造の研究
Title Transcription: カイメンソセイヘンチョウソウオモチイタサブ 0.1μmセダイ ULSIヨウテイテイコウコンタクトコウゾウノケンキュウ
Author/Editor: 安田幸夫[ほか著]
Author Heading: 安田, 幸夫ヤスダ, ユキオ
https://ci.nii.ac.jp/author/DA0511519X
Publication, Distribution, etc.: [出版者不明]
Publication Date: 2003.3
Publication Date (W3CDTF): 2003
Size: 30cm
Alternative Title: 平成12年度〜平成14年度科学研究費補助金(基盤研究B2)研究成果報告書
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 課題番号:12555005
研究分担者: 酒井朗, 池田浩也, 中塚理
Related Material (URI): https://ci.nii.ac.jp/ncid/BA63954665#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA63954665 : BA63954665