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図書

Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California pbk.

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Electron-beam, x-ray, and ion-beam lithographies VI : [proceedings] 5-6 March 1987, Santa Clara, California pbk.

Material type
図書
Author
Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publisher
The Society
Publication date
c1987
Material Format
Paper
Capacity, size, etc.
28 cm
NDC
-
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Paper

Material Type
図書
ISBN
0892528087
Volume
pbk.
Author/Editor
Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publication, Distribution, etc.
Publication Date
c1987
Publication Date (W3CDTF)
1987
Size
28 cm