1998 3rd International Symposium on Plasma Process-Induced Damage, June 4-5, 1998, Honolulu, Hawaii, USA :softbound :microfiche

1998 3rd International Symposium on Plasma Process-Induced Damage, June 4-5, 1998, Honolulu, Hawaii, USA :softbound

Material type: 図書

Author: editors, Moritaka Nakamura, Thuy Dao, and Terence Hook ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japan Society of Applied Physics

Publisher: Northern California Chapter of the American Vacuum Society

Publication date: c1998

Material Format: Paper

Capacity, size, etc.: 28 cm

NDC: -

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Notes on use

Note (General)：: "P[2]ID"--Cover"Plasma process-induced damage"--Cover"IEEE Catalog Number 98EX100"--Verso of t.p...

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Paper

Material Type: 図書
ISBN: 0965157725
0780342666
Title: 1998 3rd International Symposium on Plasma Process-Induced Damage, June 4-5, 1998, Honolulu, Hawaii, USA
Volume: :softbound
:microfiche
Author/Editor: editors, Moritaka Nakamura, Thuy Dao, and Terence Hook ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japan Society of Applied Physics
Author Heading: International Symposium on Plasma Process-Induced Damage
Nakamura, Moritaka
Dao, Leanne Thuy Lien
Hook, Terence
IEEE Electron Devices Society
https://ci.nii.ac.jp/author/DA01257512
American Vacuum Society
https://ci.nii.ac.jp/author/DA03926125
応用物理学会オウヨウブツリガッカイ
https://ci.nii.ac.jp/author/DA00633233
Publication, Distribution, etc.: Northern California Chapter of the American Vacuum Society
Publication Date: c1998
Publication Date (W3CDTF): 1998
Size: 28 cm
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Semiconductor wafers -- Defects -- Congresses
Semiconductors -- Effect of radiation on -- Congresses
Plasma etching -- Congresses
LCC: TK7871.85
Target Audience: 一般
Note (General): "P[2]ID"--Cover
"Plasma process-induced damage"--Cover
"IEEE Catalog Number 98EX100"--Verso of t.p
Includes bibliographical references and author index
Related Material (URI): https://ci.nii.ac.jp/ncid/BA46666686#entity
https://lccn.loc.gov/98065928
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA46666686 : BA46666686
LC Control Number: 98065928
https://lccn.loc.gov/98065928