回折球面波を絶対基準とする位相シフト干渉計の開発と大口径光学素子の高精度形状計測

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Material Type: 図書
Title: 回折球面波を絶対基準とする位相シフト干渉計の開発と大口径光学素子の高精度形状計測
Title Transcription: カイセツキュウメンハオゼッタイキジュントスルイソウシフトカンショウケイノカイハツトダイコウケイコウガクソシノコウセイドケイジョウケイソク
Author/Editor: 研究代表者片岡俊彦
Author Heading: 片岡, 俊彦カタオカ, トシヒコ
Publication, Distribution, etc.: [片岡俊彦]
Publication Date: 2004.4
Publication Date (W3CDTF): 2004
Size: 30cm
Alternative Title: 平成13年度〜平成15年度科学研究費補助金(基盤研究(B)(2))研究成果報告書
Place of Publication (Country Code): ja
Text Language Code: ja
Target Audience: 一般
Note (General): 課題番号: 13555034
参考文献: p129
研究発表(8p)あり
Related Material (URI): https://ci.nii.ac.jp/ncid/BA7561763X#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA7561763X : BA7561763X