Studies on electron impact excitation of the group IV hydride molecules used in plasma prpcessing

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Note (General)：: Thesis (Ph.D.)--Nagoya University, 1990Kind of academic degree: 工学博士Date degree granted: 1990-12-15...

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Material Type: 図書
Title: Studies on electron impact excitation of the group IV hydride molecules used in plasma prpcessing
Author/Editor: Kyaw Tint
Author Heading: Kyaw Tint
Publication, Distribution, etc.: [s.n.]
Publication Date: [1990]
Publication Date (W3CDTF): 1990
Size: 30 cm
Alternative Title: プラズマプロセシング用IV族水素化物分子の電子衝突励起に関する研究
Text Language Code: en
Target Audience: 一般
Note (General): Thesis (Ph.D.)--Nagoya University, 1990
Kind of academic degree: 工学博士
Date degree granted: 1990-12-15
Report number: 甲第2385号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB14861747#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB14861747 : BB14861747