ULSIにおける極微細トレンチ分離とMOSFETに関する研究

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Material Type: 図書
Title: ULSIにおける極微細トレンチ分離とMOSFETに関する研究
Title Transcription: ULSI ニオケルゴクビサイトレンチブンリト MOSFET ニカンスルケンキュウ
Author/Editor: 大石敏之 [著]
Author Heading: 大石, 敏之オオイシ, トシユキ
Publication, Distribution, etc.: [出版者不明]
Publication Date: [2000]
Publication Date (W3CDTF): 2000
Size: 30cm
Text Language Code: ja
Target Audience: 一般
Note (General): 名古屋大学大学院工学研究科2000年度博士論文
学位の種類: 博士(工学)
学位授与年月日: 2000-06-30
報告番号: 乙第5770号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB14556153#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB14556153 : BB14556153