図書

三次元赤外光弾性CT法を用いた大口径半導体結晶塊中の残留歪みの非破壊評価

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三次元赤外光弾性CT法を用いた大口径半導体結晶塊中の残留歪みの非破壊評価

Material type
図書
Author
研究代表者山田正良
Publisher
[山田正良]
Publication date
2004.3
Material Format
Paper
Capacity, size, etc.
30cm
NDC
-
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Paper

Material Type
図書
Title Transcription
サンジゲン セキガイ ヒカリ ダンセイ CTホウ オ モチイタ ダイコウケイ ハンドウタイ ケッショウカイチュウ ノ ザンリュウ ユガイミ ノ ヒハカイ ヒョウカ
Author/Editor
研究代表者山田正良
Author Heading
山田, 正良 ヤマダ, マサヨシ
Publication, Distribution, etc.
Publication Date
2004.3
Publication Date (W3CDTF)
2004
Size
30cm
Alternative Title
平成13年度〜15年度科学研究費補助金(基盤研究(B)(2))研究成果報告書(課題番号13555004