図書

高周波スパッタ蒸着法による多結晶半導体およびダイヤモンド薄膜の低温成膜

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高周波スパッタ蒸着法による多結晶半導体およびダイヤモンド薄膜の低温成膜

Material type
図書
Author
研究代表者 芳井熊安
Publisher
大阪大学工学部
Publication date
1997.4
Material Format
Paper
Capacity, size, etc.
30 cm
NDC
-
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課題番号: 07455065

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科学研究費補助金(基盤研究(B)(2))研究成果報告書Leave the NDL website.

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Paper

Material Type
図書
Title Transcription
コウシュウハ スパッタ ジョウチャクホウ ニ ヨル タケッショウ ハンドウタイ オヨビ ダイヤモンド ハクマク ノ テイオン セイマク
Author/Editor
研究代表者 芳井熊安
Author Heading
Publication, Distribution, etc.
Publication Date
1997.4
Publication Date (W3CDTF)
1997
Size
30 cm
Place of Publication (Country Code)
ja