液体原料気化CVD法による誘電体薄膜の製造とプロセスシミュレータの開発

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Material Type: 図書
Title: 液体原料気化CVD法による誘電体薄膜の製造とプロセスシミュレータの開発
Title Transcription: エキタイゲンリョウキカ CVDホウニヨルユウデンタイハクマクノセイゾウトプロセスシミュレータノカイハツ
Author/Editor: 研究代表者奥山喜久夫
Author Heading: 奥山, 喜久夫オクヤマ, キクオ
https://ci.nii.ac.jp/author/DA06420031
Publication, Distribution, etc.: 広島大学大学院工学研究科
Publication Date: 2003.3
Publication Date (W3CDTF): 2003
Size: 30cm
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 課題番号: 12450319
Related Material: 科学研究費補助金(基盤研究(B)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000796573175552
Related Material (URI): https://ci.nii.ac.jp/ncid/BA65186542#entity
Periodical Title: 科学研究費補助金(基盤研究(B)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000796573175552
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA65186542 : BA65186542