Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

Material type: 図書

Author: editors, B.O. Kolbesen ... [et al.]

Publisher: Electrochemical Society

Publication date: c2001

Material Format: Paper

Capacity, size, etc.: 24 cm

NDC: -

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Note (General)：: Includes bibliographic references and indexes

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Paper

Material Type: 図書
ISBN: 1566773636
Title: Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany
Author/Editor: editors, B.O. Kolbesen ... [et al.]
Author Heading: Symposium on Crystalline Defects and Contamination: their Impact and Control in Device Manufacturing
https://ci.nii.ac.jp/author/DA12237561
Kolbesen, Bernd O.
https://ci.nii.ac.jp/author/DA07746930
Electrochemical Society. Electronics Division
https://ci.nii.ac.jp/author/DA0357072X
European Solid State Device Research Conference
https://ci.nii.ac.jp/author/DA00938219
Publication, Distribution, etc.: Electrochemical Society
Publication Date: c2001
Publication Date (W3CDTF): 2001
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Includes bibliographic references and indexes
Related Material: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Related Material (URI): https://ci.nii.ac.jp/ncid/BA59030458#entity
https://lccn.loc.gov/2001092045
Periodical Title: Proceedings
https://cir.nii.ac.jp/crid/1130282269273401728
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA59030458 : BA59030458
LC Control Number: 2001092045
https://lccn.loc.gov/2001092045