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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- キュービックインテグレーション ギジュツ オ モチイタ ウェーハスケール ヘイレツ ショリ システム ノ シサク
- Author/Editor
- 研究代表者 小柳光正
- Author Heading
- 小柳, 光正 コヤナギ, ミツマサ中村, 維男 ナカムラ, タダオ江刺, 正喜 エサシ, マサヨシ羽根, 一博 ハネ, カズヒロ栗野, 浩之 クリノ, ヒロユキ宮川, 宣明 ミヤカワ, ノブアキ猪谷, 彦太郎 イノタニ, ヒコタロウ
- Publication, Distribution, etc.
- Publication Date
- 2002.3
- Publication Date (W3CDTF)
- 2002
- Size
- 30cm
- Place of Publication (Country Code)
- ja