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図書

Radio frequency power in plasmas : 16th Topical Conference on Radio Frequency Power in Plasmas, Park City, Utah 11-13 April 2005

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Radio frequency power in plasmas : 16th Topical Conference on Radio Frequency Power in Plasmas, Park City, Utah 11-13 April 2005

Material type
図書
Author
editors, Stephen J. Wukitch, Paul T. Bonoli
Publisher
American Institute of Physics
Publication date
c2005
Material Format
Paper
Capacity, size, etc.
25 cm
NDC
-
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Paper

Material Type
図書
ISBN
0735402760
Author/Editor
editors, Stephen J. Wukitch, Paul T. Bonoli
Publication, Distribution, etc.
Publication Date
c2005
Publication Date (W3CDTF)
2005
Size
25 cm
Place of Publication (Country Code)
us