流動層粒子循環系を用いた多結晶シリコン製造プロセスの開発

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Material Type: 図書
Title: 流動層粒子循環系を用いた多結晶シリコン製造プロセスの開発
Title Transcription: リュウドウソウリュウシジュンカンケイオモチイタタケッショウシリコンセイゾウプロセスノカイハツ
Author/Editor: 阿尻雅文研究代表者
Author Heading: 阿尻, 雅文アジリ, タダフミ
https://ci.nii.ac.jp/author/DA17057465
Publication, Distribution, etc.: [阿尻雅文]
Publication Date: 1990.3
Publication Date (W3CDTF): 1990
Size: 26cm
Alternative Title: 昭和63, 平成元年度科学研究費補助金(試験(1))研究成果報告書 : (研究課題番号 63850187)
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 課題番号: 63850187
Related Material: 科学研究費補助金(試験研究1)研究成果報告書
https://cir.nii.ac.jp/crid/1130282272062531456
Related Material (URI): https://ci.nii.ac.jp/ncid/BB12363818#entity
Periodical Title: 科学研究費補助金(試験研究1)研究成果報告書
https://cir.nii.ac.jp/crid/1130282272062531456
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB12363818 : BB12363818