単結晶Al2O3膜上への超平坦・高品質Si薄膜成長法の研究

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Material Type: 図書
Title: 単結晶Al2O3膜上への超平坦・高品質Si薄膜成長法の研究
Title Transcription: タンケッショウ Al2O3マクジョウエノチョウヘイタン・コウヒンシツ Siハクマクセイチョウホウノケンキュウ
Author/Editor: 石田誠研究代表
Author Heading: 石田, 誠イシダ, マコト
https://ci.nii.ac.jp/author/DA08333164
Publication, Distribution, etc.: 石田誠
Publication Date: 1998.3
Publication Date (W3CDTF): 1998
Size: 30cm
Place of Publication (Country Code): ja
Target Audience: 一般
Note (General): 研究課題番号: 08455144
代表者所属: 豊橋技術科学大学工学部
Related Material: 科学研究費補助金(基盤研究(B)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000796573175552
Related Material (URI): https://ci.nii.ac.jp/ncid/BA79826915#entity
Periodical Title: 科学研究費補助金(基盤研究(B)(2))研究成果報告書
https://cir.nii.ac.jp/crid/1130000796573175552
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA79826915 : BA79826915