Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991

Material type: 図書

Author: sponsored by the IEEE Robotics and Automation Society, and incooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division

Publisher: IEEE

Publication date: c1991

Material Format: Paper

Capacity, size, etc.: 30 cm

NDC: -

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Notes on use

Note (General)：: Papers presented at the fourth IEEE Workshop on Micro Electro Mechanical Systems"IEEE catalog number 91CH2957-9"Title on spine: IEEE micro electro mec...

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Paper

Material Type: 図書
ISBN: 0879426411
Title: Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991
Author/Editor: sponsored by the IEEE Robotics and Automation Society, and incooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division
Author Heading: IEEE Robotics and Automation Society
https://ci.nii.ac.jp/author/DA04995713
Insitute of Electrical Engineers of Japan
American Society of Mechanical Engineers. Dynamic Systems and Control Division
https://ci.nii.ac.jp/author/DA04247639
IEEE Workshop on Micro Electro Mechanical Systems
https://ci.nii.ac.jp/author/DA04552610
Publication, Distribution, etc.: IEEE
Publication Date: c1991
Publication Date (W3CDTF): 1991
Size: 30 cm
Alternative Title: Micro electro mechanical systems
91CH29579
MEMS
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: Electromechanical devices -- Congresses
Miniature objects -- Congresses
Microelectronics -- Congresses
Robotics -- Congresses
LCC: TK153
Target Audience: 一般
Note (General): Papers presented at the fourth IEEE Workshop on Micro Electro Mechanical Systems
"IEEE catalog number 91CH2957-9"
Title on spine: IEEE micro electro mechanical systems workshop
Includes bibliographical references and indexes
Related Material (URI): https://ci.nii.ac.jp/ncid/BA11856914#entity
https://lccn.loc.gov/90085702
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA11856914 : BA11856914
LC Control Number: 90085702
https://lccn.loc.gov/90085702