Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

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Material Type: 図書
ISBN: 1558994521
Title: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
Author/Editor: editors, Arthur H. Heuer, S. Jushua Jacobs
Author Heading: Heuer, A. H. (Arthur Harold)
https://ci.nii.ac.jp/author/DA01036615
Jacobs, S. Joshua
https://ci.nii.ac.jp/author/DA12398367
Publication, Distribution, etc.: Materials Research Society
Publication Date: c1999
Publication Date (W3CDTF): 1999
Size: 24 cm
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Includes bibliographical references and indexes
Related Material: Materials Research Society symposium proceedings
https://cir.nii.ac.jp/crid/1130282268858574848
Related Material (URI): https://ci.nii.ac.jp/ncid/BA44647909#entity
https://lccn.loc.gov/99051976
Periodical Title: Materials Research Society symposium proceedings
https://cir.nii.ac.jp/crid/1130282268858574848
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA44647909 : BA44647909
LC Control Number: 99051976
https://lccn.loc.gov/99051976