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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- キンゾク オ ドープシタ ハンドウタイセイ DLCマク ノ ナノスケール セイギョ プラズマ CVD
- Author/Editor
- 高井治 [ほか著]
- Author Heading
- 高井, 治 タカイ, オサム
- Publication, Distribution, etc.
- Publication Date
- 1998.3
- Publication Date (W3CDTF)
- 1998
- Size
- 30cm
- Alternative Title
- 平成9年度科学研究費補助金(基盤研究(B)(2))研究成果報告書